Cookies on this website
We use cookies to ensure that we give you the best experience on our website. If you click 'Continue' we'll assume that you are happy to receive all cookies and you won't see this message again. Click 'Find out more' for information on how to change your cookie settings.

Low Voltage Scanning Electron Microscopy (LV-SEM) has become a very promising approach to perform Energy Dispersive X-ray (EDX) chemical mapping with high- lateral resolution [1]. Using voltages as low as 1.5keV, sub-10nm resolutions can be achieved. In this work, we try to take advantage of the small interaction volume in order to simplify the otherwise more complex SEM quantitative methodology. This way, phenomena such as absorption and fluorescence can be ignored and, effectively treat the quantification as with the Transmission Electron Microscopy (TEM)-based Cliff-Lorimer method. Experimental k- factors have been obtained from a series of standards and used to quantify complex oxide phases in steels.

Original publication




Conference paper

Publication Date